Controlled in situ boron doping of short silicon nanowires grown …
Silicon nanowires (Si NWs) are potential building blocks for semiconductor nanodevices and circuits. 1 To fabricate NW devices it is necessary to find ways of controlled doping ( p or n ) including specific concentration profiles. In situ p doping of Si NWs with boron has already been demonstrated by different techniques 2–4 where the …
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