A review of boron carbon nitride thin films and progress in
Particularly, compounds in the boron–carbon–nitrogen phase diagram such as diamond (C), cubic boron nitride (c-BN), and boron carbide (B 4 C) are popular due to their covalent bonding, short bond lengths, and low atomic mass, which give the material low dielectric constant along with excellent thermal and mechanical strength [[1], [2], [3 ...
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