Correlation between stoichiometry and properties of scandium oxide
Section snippets Film preparation. The scandium oxide films were deposited using an unbalanced magnetron source (Torus™ sputter gun) with a planar scandium target (99.95% Sc purity, diameter of 101.6 mm and thickness of 3 mm) in a Kurt J. Lesker sputtering system (PVD225).The system was initially pumped down with a scroll pump …
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